All-sound-state ultraviolet lasers have already been commonly Employed in the fields of mechanical flaw detection, lithography, micromachining and drugs for some great benefits of tiny volume, prolonged everyday living, high efficiency, great beam excellent, large tuning and slender spectral line, and many others. Making use of high ability in close proximity to-infrared coherent mild resource as the fundamental frequency resource based upon nonlinear tuning know-how, producing ultraviolet coherent radiation by multistage frequency conversion is considered to be a vital way to build the ultraviolet coherent light-weight supply.
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The average electrical power of your NIR laser continue to has the probable for being enhanced to tens of watts for example 70 W [26] In the event the double-go configuration may very well be used for that Yb:YAG SCF amplifier phase. For this reason, In the event the conversion performance of 31% from NIR to DUV could possibly be however maintained at this increased power issue, the average output electricity of the DUV laser at 258 nm could possibly be in excess of twenty W, which might be considered a amazing power level for your DUV laser and bring about the unanticipated DUV laser machining benefits. Furthermore, for prime-electricity DUV laser, the UV injury on the nonlinear crystal, including the windows for CLBO crystal plus the mirrors, is an additional critical parameter for long run and stable Procedure.
Then again, the beam high quality of the higher electric power DUV laser would turn out to be even worse because of far more serious thermal and nonlinear results. For this reason, the frequency conversion processes need to be cautiously intended to mitigate the aforementioned results. As a result, a superior-electric power DUV laser at the FHG of 1 μm with a great beam good quality may very well be attained and will be useful for acquiring the shorter wavelength DUV lasers including 193 nm by SFG.
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On one other aspect, the power scaling from the NIR laser is another factor to raise the common electrical power with the 193-nm DUV laser. A result of the deficiency of the substantial-electrical power amplification Remedy of the NIR laser (such as at 1553 nm), nonlinear frequency procedures such as optical parameter oscillation (OPO) may very well be placed on develop a wavelength converter by shifting the wavelength from one μm to the desired wavelength and also getting relative larger electrical power [21]. Not long ago, a diamond Raman laser showed its get more info capacity in acquiring a higher electricity in addition to a high conversion efficiency in the 1st Stokes of the 1-μm laser [22,23], which implies the likelihood being utilized inside the 193-nm DUV laser technology as a consequence of its higher Raman get and large frequency shift.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of the Nd:YAG fundamental laser wavelength. As a way to boost the hurt threshold, lower CLBO floor roughness, by ultra-precision machining, is needed. Because the CLBO crystal has easy hydroscopic response and micro scratches in machining, extremely-exact machining of the CLBO crystal is usually a tricky specialized issue.
The beam profile shown in Figure 7b demonstrated a very good beam high quality as among the list of deserves of Raman laser, which would be advantageous to make a 193-nm DUV laser with a top quality beam.
The conversion performance from elementary NIR to DUV is from 5% to 36% based on the noted brings about Table one. Growing the conversion performance will reduce the load on the look and setup of the elemental laser amplifier in addition to the electric powered electricity use. An excellent beam high-quality of the fundamental laser may even add towards the rising of your conversion efficiency and also the appropriate electric power depth of your NIR and green laser within the SHG and FHG method, respectively. The very best conversion efficiencies from NIR to inexperienced and eco-friendly to DUV laser by utilization of CLBO crystal are 70% and close to 50%, respectively [12], which corresponds to the conversion performance of 35% from elementary to DUV.
The event in the 193-nm laser was shown by stages of SFG. So as to scale the DUV laser energy proficiently, a fresh strategy from the 193-nm DUV laser era is introduced according to the diamond Raman laser.